Vacuum Series

Optical Incremental Encoders for Vacuum Applications

For vacuum applications up to 10 E-9 mBar atmospheric pressure, individual measuring lengths and many more features

Linear encoders

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Vacuum

LIK 21 vac

The LIK Series was especially designed for applications with limited installation space. With its integrated 2-field EPIFLEX sensor module it is geared up for rougher applications also.

  • Special vaccum version of the LIK 21 with housing varaint 1
  • With EPIFLEX sensor module (2-field scanning)
  • Components are vacuum compatible up to 10 E-9 mbar (UHV) atmospheric pressure
  • Heating cycles of 12 h at 150 °C possible
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data

LIK 22 vac

The LIK Series was especially designed for applications with limited installation space. With its integrated 2-field EPIFLEX sensor module it is geared up for rougher applications also.

  • Special vaccum version of the LIK 22 with housing varaint 2
  • With EPIFLEX sensor module (2-field scanning)
  • Components are vacuum compatible up to 10 E-9 mbar (UHV) atmospheric pressure
  • Heating cycles of 12 h at 150 °C possible
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data

LIK 23 vac

The LIK Series was especially designed for applications with limited installation space. With its integrated 2-field EPIFLEX sensor module it is geared up for rougher applications also.

  • Special vaccum version of the LIK 23 with housing varaint 3
  • With EPIFLEX sensor module (2-field scanning)
  • Components are vacuum compatible up to 10 E-9 mbar (UHV) atmospheric pressure
  • Heating cycles of 12 h at 150 °C possible
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data

LIK 41 vac

The LIK Series was especially designed for applications with limited installation space. The LIK 41 is the smallest variant of this series and was especially equipped with a 1-field sensor to minimize the size of the housing.

  • Special vaccum version of the LIK 41 with EPIFLEX sensor module (1-field scanning)
  • Components are vacuum compatible up to 10 E-9 mbar (UHV) atmospheric pressure
  • Heating cycles of 12 h at 150 °C possible
  • Especially small dimensions
  • Individually configurable
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data

Kit L2 vac

The Kit L Series was especially designed for applications with especially customized requirements. These systems are not only extremely small, they are also particularly configurable. Your ideas won't be hardly limited with this series.

  • Special vaccum version of the Kit L2 with EPIFLEX sensor module (2-field scanning)
  • With EPIFLEX sensor module (2-field scanning)
  • Components are vacuum compatible up to 10 E-6 mbar (HV) atmospheric pressure
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data

Kit L4 vac

The Kit L Series was especially designed for applications with especially customized requirements. These systems are not only extremely small, they are also particularly configurable. Your ideas won't be hardly limited with this series.

  • Special vaccum version of the Kit L4 with EPIFLEX sensor module (1-field scanning)
  • With EPIFLEX sensor module (2-field scanning)
  • Components are vacuum compatible up to 10 E-6 mbar (HV) atmospheric pressure
  • 1 Vpp or RS 422 output signal
  • Up to 100-times signal interpolation
  • Smallest measuring step 50 nm
  • Traversing speed up to 10 m/s (with 1 Vpp)

User Manual   CAD - Data


Scale Tapes

Stainless Steel

SINGLEFLEX

The SINGLEFLEX-scale tape consists of a single stainless steel tape with an applied incremental track and one or more reference marks or a PRC code. The scale tape is equipped with a double-sided adhesive tape and can be mounted easily on the machine element.

 

 

Glass

Glass Scales

For applications with special environmental conditions (e.g. magnetic fields, heat sources, vacuum, etc.) or for special demands on the dimensions we also offer scales made of glass.